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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Modeling and Implementation of a Real-Time Embedded Scheduler for CVD Cluster Tools

Shin, Yong-Ho; Kim, Ja-Hee; Lee, Hwan-Yong; Lee, Tae-Eogresearcher, Modeling and Analysis of Semiconductor Manufacturing, pp.78 - 82, 2000-05

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