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Results 1-4 of 4 (Search time: 0.004 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Modeling and Implementation of a Real-Time Embedded Scheduler for CVD Cluster Tools

Shin, Yong-Ho; Kim, Ja-Hee; Lee, Hwan-Yong; Lee, Tae-Eog, Modeling and Analysis of Semiconductor Manufacturing, pp.78 - 82, 2000-05

2
Scheduling of Dual-Armed Cluster Tools with Time Constraints

Kim, Ja-Hee; Lee, Tae-Eog; Lee, Hwan-Yong, MASM, pp.1 - 6, 2002-04

3
Scheduling a Time-Constrained Wet Station with Multiple Job Flows and Multiple Wafer Handling Robots

Lee, Hwan-Yong; Lee, Tae-Eog, MASM, pp.1 - 6, 2005-10-01

4
Workload Balancing and Scheduling of a Single-Armed Cluster Tool

Lee, Tae-Eog; Lee, Hwan-Yong; Shin, Yong-Ho, APIEMS, pp.1 - 6, 2004-12-01

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