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| NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
|---|---|
| Performance Evaluation of Serial Photolithography Clusters: Queueing Models, Throughput and Workload Sequencing Morrison, James R; Bortnick, Beverly; Martin, Donald P., Advanced Semiconductor Manufacturing Conference, 2006. ASMC 2006. The 17th Annual SEMI/IEEE, pp.44 - 49, IEEE, 2006-05 |
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