Results 1-3 of 3 (Search time: 0.005 seconds).
NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment Park, Kyungsu; Morrison, James R, 6th Annual IEEE Conference on Automation Science and Engineering , pp.45 - 50, IEEE CASE, 2010-08 | |
Control of wafer release in multi cluster tools Park, Kyungsu; Morrison, James R, 8th IEEE International Conference on Control and Automation, pp.1481 - 1487, ICCA, 2010-06 | |
Wafer admission control for clustered photolithography tools Park, Kyungsu; Morrison, James R, Advanced Semiconductor Manufacturing Conference , pp.220 - 225, ASMC, 2010-07 |