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An Efficient Scheduling Method Based on an Assignment Model for Robotized Cluster Tools Jung, Chihyun; Lee, Tae-Eog, IEEE 2008 International Conference on Automation Science and Engineering, pp.79 - 84, 2008-08-25 |
Cyclic Scheduling of Cluster Tools with Non-Identical Chamber Access Times Kim, Dae-Kyu; Jung, Chihyun; Lee, Tae-Eog; Jung, Yu-Ju, 2011 Winter Simulation Conference/Modeling and Analysis of Semiconductor Manufacturing, pp.2073 - 2084, WSC, 2011-12-14 |
Efficient scheduling method based on an assignment model for robotized cluster tools Jung, Chihyun; Lee, Tae-Eog, 4th IEEE Conference on Automation Science and Engineering, CASE 2008, pp.79 - 84, 123, 2008-08-23 |
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