LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION OF BLANKET TUNGSTEN USING A GASEOUS MIXTURE OF WF6, SIH4, AND H2

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Publisher
ELSEVIER SCIENCE SA LAUSANNE
Issue Date
1989-12
Language
English
Article Type
Article
Citation

THIN SOLID FILMS, v.181, no.1, pp.85 - 93

ISSN
0040-6090
URI
http://hdl.handle.net/10203/60514
Appears in Collection
MS-Journal Papers(저널논문)RIMS Journal Papers
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