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College of Natural Sciences(자연과학대학)Dept. of Chemistry(화학과)CH-Journal Papers(저널논문)

High resolution single-component resists based on terpolymers having photoacid-generating camphorsulfonyloxymaleimide units

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Kim, S.-T. / Kim, Jin-Baek researcher / Kim, J.-M. / Chung, C.-M. / Ahn, K.-D.

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Publisher: Technical Association of Photopolymers

Issue Date: 1997

Language: English

Citation: JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, v.10, no.3, pp.489 - 492

ISSN: 0914-9244

DOI: 10.1116/1.578176

URI: http://hdl.handle.net/10203/60494

Appears in Collection: CH-Journal Papers(저널논문)

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