DSpace at KOASAS: 실리콘 웨이퍼에서 Denuded Zone 형성및 Generation Life Time 증가 효과

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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

실리콘 웨이퍼에서 Denuded Zone 형성및 Generation Life Time 증가 효과

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김현수 / 민석기 / 이주천

Publisher: 한국물리학회

Issue Date: 1987-06

Language: Korean

Citation: 새물리, v.27, no.3, pp.290 - 297

ISSN: 0369-8009

URI: http://hdl.handle.net/10203/60425

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