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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Control of wafer temperature uniformity in rapid thermal processing using an optimal iterative learning control technique

Lee, KS; Lee, Jresearcher; Chin, I; Choi, J; Lee, JayHyungresearcher, INDUSTRIAL ENGINEERING CHEMISTRY RESEARCH, v.40, no.7, pp.1661 - 1672, 2001-04

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