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Results 1-1 of 1 (Search time: 0.002 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Synthesis of Silica-Coated Ceria Particles for STI-CMP in a Single Step by Flame Spray Pyrolysis with an Emulsion

Song, Shin Ae; Park, SeungBin, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.158, no.8, pp.170 - 174, 2011

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