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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Synthesis of Silica-Coated Ceria Particles for STI-CMP in a Single Step by Flame Spray Pyrolysis with an Emulsion Song, Shin Ae; Park, SeungBin, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.158, no.8, pp.170 - 174, 2011 |