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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Control of wafer temperature uniformity in rapid thermal processing using an optimal iterative learning control technique Lee, KS; Lee, J; Chin, I; Choi, J; Lee, JayHyung, INDUSTRIAL ENGINEERING CHEMISTRY RESEARCH, v.40, no.7, pp.1661 - 1672, 2001-04 |