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Molecular dynamics simulation of energetic ion bombardment onto a-Si(3)N(4) surfaces Kim, DH; Kim, DoHyun; Lee, KS, JOURNAL OF CRYSTAL GROWTH, v.230, no.1-2, pp.285 - 290, 2001-08 |
Plasma sputtering of silicon dioxide substrate by low energy Ar ion bombardment: molecular dynamics simulation Kim, DH; Lee, SY; Kim, DoHyun, JOURNAL OF CRYSTAL GROWTH, v.237, pp.217 - 222, 2002-04 |
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