Browse "CBE-Journal Papers(저널논문)" by Subject ECR PLASMA
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Effect of process parameters of UV enhanced gas phase cleaning on the removal of PMMA (Polymethylmethacrylate) from a Si substrate Kwon, Sung Ku; Kim, Do Hyun, TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, v.17, no.4, pp.204 - 207, 2016-08 |
| Effect of process parameters of UV-assisted gas-phase cleaning on the removal of PEG (polyethyleneglycol) from a Si substrate Kwon, Sung Ku; Kim, DoHyun, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.49, pp.1421 - 1427, 2006-10 |
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