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High-Fidelity, Sub-5 nm Patterns from High-chi Block Copolymer Films with Vapor-Deposited Ultrathin, Cross-Linked Surface-Modification Layers Wang, Hyun Suk; Oh, Seula; Choi, Junhwan; Jang, WonTae; Kim, Ki Hyun; Arellano, Carlos Luis; Huh, June; et al, MACROMOLECULAR RAPID COMMUNICATIONS, v.41, no.4, pp.1900514, 2020-02 |
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