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A Single-Chamber System of Initiated Chemical Vapor Deposition and Atomic Layer Deposition for Fabrication of Organic/Inorganic Multilayer Films Kim, Bong Jun; Park, Hongkeun; Seong, Hyejeong; Lee, Min Seok; Kwon, Byoung-Hwa; Kim, Do Heung; Lee, Young Il; et al, ADVANCED ENGINEERING MATERIALS, v.19, no.6, 2017-06 |
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