Browse "CBE-Conference Papers(학술회의논문)" by Author Bae, S. H.

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Performance of Sol-Gel Grown Silica Slurries in the Polishing of Silicon Wafer

Bae, S. H.; So, J.-H.; Yang, S.-M.; Kim, DoHyun, Proc. 12th Intern. Symposium on Chemical Engineering, pp.147 - 148, 1999-10

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