Browse "CBE-Conference Papers(학술회의논문)" by Author 김현배

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New-Fine patterning method of positive photoresist by silylation/ wet develop

김주태; 장태호; 김현배; 김남윤; 박희균; 우성일, Conf. on Semiconductor Materials, Components and Computer Aided Design, Spring Symp., KITE, v.11, no.1, pp.293 - 296, 대한전자공학회, 1993-01

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