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Preparation and Characterization of SOG thin film for interdielectric layer and planarization Nam, CW; Woo, Seong-Ihl, 3rd Industry/Academy Cooperation Research Seminar, Electronic Ceramics Research Center, pp.119 - 225, 1993 |
Preparation and Electric Properties of Spin-on Glass Films for the Planarization Process in Multilevel Interconnection Nam, CW; Woo, Seong-Ihl, 한국화학공학회 추계학술발표회, 한국화학공학회, 1993-10 |
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