TWO-DIMENSIONAL IMPURITY PROFILING NEAR THE MASK EDGE USING ANODISATION.
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kyung, Chong-Min | ko |
| dc.date.accessioned | 2013-02-25T03:07:12Z | - |
| dc.date.available | 2013-02-25T03:07:12Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1985-07 | - |
| dc.identifier.citation | ELECTRONICS LETTERS, v.21, no.14, pp.587 - 588 | - |
| dc.identifier.issn | 0013-5194 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/59346 | - |
| dc.language | English | - |
| dc.publisher | INST ENGINEERING TECHNOLOGY-IET | - |
| dc.title | TWO-DIMENSIONAL IMPURITY PROFILING NEAR THE MASK EDGE USING ANODISATION. | - |
| dc.type | Article | - |
| dc.identifier.wosid | A1985ALT8700003 | - |
| dc.identifier.scopusid | 2-s2.0-0022418804 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 21 | - |
| dc.citation.issue | 14 | - |
| dc.citation.beginningpage | 587 | - |
| dc.citation.endingpage | 588 | - |
| dc.citation.publicationname | ELECTRONICS LETTERS | - |
| dc.contributor.localauthor | Kyung, Chong-Min | - |
| dc.type.journalArticle | Article | - |
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