Chemical vapor deposition of titanium carbide on AlSl M2 tool steels and Si3N4-TiC ceramic composite

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TiC deposition experiments were performed on high speed steel and on Si3N4-TiC composite ceramic cutting tools through chemical vapor deposition (CVD) using gaseous mixture of TiCl4, CH4, and H2. The effects of the deposition temperature and the composition of reactant gases on deposition rate, structure and microhardness of the TiC film were investigated. Experimental apparatus and deposition procedures are also presented. Deposition at 1323K with (CH4/TiCl4) ratio of 1.2 gives the optimum mechanical properties of the film for AISI M2 steel substrate while Si3N4-TiC composite shows its maximum strength at 1373K and 1.3(CH4/TiCl4).
Publisher
Taylor and Francis Inc.
Issue Date
1990
Language
English
Citation

MATERIALS AND MANUFACTURING PROCESSES, v.5, no.1, pp.63 - 78

ISSN
1042-6914
URI
http://hdl.handle.net/10203/57320
Appears in Collection
MS-Journal Papers(저널논문)RIMS Journal Papers
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