Chemical vapor deposition of titanium carbide on AlSl M2 tool steels and Si3N4-TiC ceramic composite

Abstract

TiC deposition experiments were performed on high speed steel and on Si3N4-TiC composite ceramic cutting tools through chemical vapor deposition (CVD) using gaseous mixture of TiCl4, CH4, and H2. The effects of the deposition temperature and the composition of reactant gases on deposition rate, structure and microhardness of the TiC film were investigated. Experimental apparatus and deposition procedures are also presented. Deposition at 1323K with (CH4/TiCl4) ratio of 1.2 gives the optimum mechanical properties of the film for AISI M2 steel substrate while Si3N4-TiC composite shows its maximum strength at 1373K and 1.3(CH4/TiCl4).