THE DEPOSITION CHARACTERISTICS AND THE STRUCTURAL NATURE OF THE DEPOSIT IN THE CHEMICAL VAPOR-DEPOSITION OF BORON

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Publisher
ELSEVIER SCIENCE SA LAUSANNE
Issue Date
1985-09
Language
English
Article Type
Article
Citation

THIN SOLID FILMS, v.131, no.3-4, pp.205 - 214

ISSN
0040-6090
DOI
10.1016/0040-6090(85)90141-5
URI
http://hdl.handle.net/10203/56562
Appears in Collection
RIMS Journal Papers
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