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Characterization of two by two electron-beam microcolumn array aligned with field emission array

Park, JY; Lera, JD; Choi, HJ; Buh, GH; Kang, CJ; Jung, JH; Choi, SS; et al, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.16, no.2, pp.826 - 828, 1998-03

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