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19
Top surface imaging study by selective chemisorptions of poly(dimethyl siloxane) on diazoketo-functionalized polymeric surface

Ganesan, Ramakrishnan; Youn, Seul Ki; Yun, Jei Moon; Kim, Jin-Baek, 24th European Mask and Lithography Conference, EMLC 2008, 2008-01-21

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