Showing results 4 to 8 of 8
High Resolution Bilayer Resists Using Blends of Photoresists and Silicon-Containing Materials Woo, Seung A; Kim, Jin-Baek, 2011 KAIST-Kyoto University Chemistry Symposium, 2011-02-17 |
High resolution nonchemically amplified resists (Non-CARs) for extreme ultraviolet Woo, Seung A; Choi, Soo-Young; Ku, Se Jin; Kim, Jin-Baek, 2012 Advanced lithography, SPIE Advanced Lithography, 2012-02-14 |
Improved Top Surface Imaging Process for High Aspect Ratio Patterns Woo, Seung A; Park, Jiyoung; Kim, Sumin; Kim, Jin-Baek, 한국고분자학회 2009년도 추계 학술대회 , 한국고분자학회, 2009-10-08 |
Simple Top Surface Imaging System by Blending Photoresists and Silicon-containing materials Woo, Seung A; Kim, Jin-Baek, 한국고분자학회 2010년 춘계 학술대회 , 한국고분자학회, 2010-04-08 |
Study of nano-patterning using silicon-containing materials = 실리콘을 포함하는 물질을 이용한 나노 패터닝에 관한 연구link Woo, Seung A; 우승아; et al, 한국과학기술원, 2013 |
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