Showing results 1 to 2 of 2
Characteristics of the Deposition Rate per Unit Power on Pulsed-DC Magnetron Sputtering Source An, Sang-Hyuk; In, Jung-Hwan; Chang, Hong-Young, PLASMA PROCESSES AND POLYMERS, v.6, no.12, pp.855 - 859, 2009-12 |
Chopping effect on the crystallinity of ZnO films prepared by a r.f. planar magnetron sputtering method Han, BM; Chang, S; Kim, Soo Yong, THIN SOLID FILMS, v.338, no.1-2, pp.265 - 268, 1999-01 |
Discover