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Showing results 1 to 2 of 2

1
A new inside-type segmented coil antenna for uniformity control in a large-area inductively coupled plasma

Lee, Pyung-Woo; Kim, Sung-Sik; Seo, Sang-Hun; Chang, Choong-Seock; Chang, Hongyoung; Ichiki,Takanori; Horiike,Yasuhiro, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.39, no.6A, pp.548 - 550, 2000-06

2
On inductively coupled plasmas for next-generation processing

Lee, YK; Lee, DS; Bai, KH; Chung, CW; Chang, Hong-Young, SURFACE COATINGS TECHNOLOGY, v.169, pp.20 - 23, 2003-06

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