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Showing results 1 to 5 of 5

1
Characteristics of the Plasma Source for Ground Ionosphere Simulation Surveyed by Disk-Type Langmuir Probe

Ryu, Kwangsun; Lee, Jun Chan; Kim, Son-Goo; Chung, Tae Jin; SHIN, Goo-Hwan; Cha, Wonho; Min, Kyoungwook; et al, JOURNAL OF ASTRONOMY AND SPACE SCIENCES, v.34, no.4, pp.343 - 351, 2017-12

2
Characterization of a high-frequency inductively coupled plasma source

Lee, DS; Jun, HS; Chang, Hong-Young, THIN SOLID FILMS, v.506, pp.469 - 473, 2006-05

3
Development of a dual inductively coupled plasma source for direct and remote plasma generation in a reactor

Uhm, S; Lee, KH; Chang, Hong-Young; Chung, CW, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS REVIEW PAPERS, v.44, no.2, pp.1081 - 1085, 2005-02

4
Parallelizability of helicon and inductively coupled plasma sources for large-area processing = 대면적 공정을 위한 헬리콘과 유도결합 플라즈마 소스의 평행화 연구link

An, Sang-Hyuk; 안상혁; et al, 한국과학기술원, 2011

5
병렬 공명 안테나를 이용한 유도 결합 플라즈마 원 개발 및 플라즈마 변수 제어에 관한 연구 = Development of an inductively coupled plasma source using a parallel resonance antenna and study on the plasma parameter controllink

이동석; Lee, Dong-Seok; et al, 한국과학기술원, 2005

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