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Low-dielectric-constant-film deposition with various gases in a helicon plasma reactor Yun, SM; Chang, Hong-Young; Oh, KS; Choi, CK, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.38, no.7B, pp.4531 - 4534, 1999-07 |
고밀도 자화 플라즈마에서의 자발적 진동 및 구조형성 현상에 관한 연구 = Phenomena of self-oscillation and structure formation in high density magnetized plasmalink 허승회; Huh, Song-Whe; et al, 한국과학기술원, 2005 |
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