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Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges Kim, SS; Chung, CW; Chang, Hong-Young, THIN SOLID FILMS, v.435, pp.72 - 77, 2003-07 |
Theoretical study on heating characteristics of helicon discharge = 헬리콘 방전의 가열 특성에 관한 이론적 연구link Park, Byoung-Ho; 박병호; et al, 한국과학기술원, 2001 |
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