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Showing results 1 to 5 of 5

1
Anomalous behaviors of plasma parameters in unbalanced direct-current magnetron discharge

Seo, SH; Chang, Hong-Young, PHYSICS OF PLASMAS, v.11, pp.3595 - 3601, 2004-07

2
Effects of a sheath boundary on electron energy distribution in Ar/He dc magnetron discharges

Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.57 - 64, 2004-07

3
Electron drift and the loss balance of charged particles in planar-unbalanced dc magnetron discharge

Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.97, pp.335 - 347, 2005-01

4
Electron transport in the downstream region of planar unbalanced magnetron discharge

Seo, SH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.1310 - 1317, 2004-08

5
Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge

Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.13, no.3, pp.409 - 419, 2004-08

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