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Showing results 1 to 4 of 4

1
Electron and ion kinetics in magnetized capacitively coupled plasma source

Lee, SH; You, SJ; Chang, Hong-Young; Lee, JK, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.25, pp.455 - 463, 2007-05

2
Role of transverse magnetic field in the capacitive discharge

You, SJ; Hai, TT; Park, M; Kim, DW; Kim, JH; Seong, DJ; Shin, YH; et al, THIN SOLID FILMS, v.519, pp.6981 - 6989, 2011-08

3
The effect of the driving frequency on the optimum hole diameter for efficient multi-hole electrode RF capacitively coupled plasma

Lee, HunSu; Kim, EunAe; Lee, YunSeong; Chang, Hong-Young, THIN SOLID FILMS, v.547, pp.289 - 292, 2013-11

4
The trend of electron temperature and electron density in the process of microcrystalline silicon solar cells

Lee, Yun-Seong; In, Jung-Hwan; Ahn, Seung-Kyu; Seo, Sang-Hun; Chang, Hong-Young; You, Dong-Joo; Ahn, Seh-Won; et al, CURRENT APPLIED PHYSICS, v.10, pp.S234 - S236, 2010-03

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