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Showing results 1 to 4 of 4

1
Anomalous behaviors of plasma parameters in unbalanced direct-current magnetron discharge

Seo, SH; Chang, Hong-Young, PHYSICS OF PLASMAS, v.11, pp.3595 - 3601, 2004-07

2
Effects of a sheath boundary on electron energy distribution in Ar/He dc magnetron discharges

Seo, SH; In, JH; Chang, Hong-Young, JOURNAL OF APPLIED PHYSICS, v.96, pp.57 - 64, 2004-07

3
Effects of substrate bias on electron energy distribution in magnetron sputtering system

Seo, Sang-Hun; In, Jung-Hwan; Chang, Hong-Young; Han, Jeon-Geon, PHYSICS OF PLASMAS, v.11, no.10, pp.4796 - 4800, 2004-10

4
Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge

Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.13, no.3, pp.409 - 419, 2004-08

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