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Electron and ion kinetics in magnetized capacitively coupled plasma source Lee, SH; You, SJ; Chang, Hong-Young; Lee, JK, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.25, pp.455 - 463, 2007-05 |
Experimental observation of the inductive electric field and related plasma nonuniformity in high frequency capacitive discharge Ahn, Seung Kyu; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.93, no.3, 2008-07 |
Review of heating mechanism in inductively coupled plasma Seo, SH; Chung, CW; Chang, Hong-Young, SURFACE COATINGS TECHNOLOGY, v.131, no.1-3, pp.1 - 11, 2000-09 |
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