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Characteristics of an inductively coupled plasma source using a parallel resonance antenna Lee, Dongseok; Lee, YK; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.13, pp.701 - 706, 2004-11 |
Heating-mode transition in the capacitive mode of inductively coupled plasmas Chung, CW; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.80, no.10, pp.1725 - 1727, 2002-03 |
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