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All-Around HfO2 Stressor for Tensile Strain in GeSn-on-Insulator Nanobeam Lasers Joo, Hyo-Jun; Kim, Youngmin; Chen, Melvina; Burt, Daniel; Zhang, Lin; Son, Bongkwon; Luo, Manlin; et al, ADVANCED OPTICAL MATERIALS, v.11, no.24, 2023-12 |
Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature Song, Hohyun; Seo, Sang Hun; Chang, Hongyoung, CURRENT APPLIED PHYSICS, v.18, no.11, pp.1436 - 1440, 2018-11 |
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