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Showing results 1 to 4 of 4

1
A Study on Characteristics of SF6/O2 Capacitive Discharge with QMS and Langmuir Probe

Chang, Hong-Young; Lee, HS; Ahn, SK; You, SJ, AEPSE 2007, AEPSE, 2007

2
Driving frequency effect on electron heating mode transition in capacitive discharge

You, SJ; Ahn, SK; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.89, pp.477 - 494, 2006-10

3
Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition

Ahn, SK; You, SJ; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.89, pp.928 - 936, 2006-10

4
Study on the mode transitions for rf power dissipation in capacitively coupled plasma

You, SJ; Ahn, SK; Chang, Hong-Young, SURFACE & COATINGS TECHNOLOGY, v.193, pp.81 - 87, 2005-04

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