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Capacitive Electron Cooling in an Inductively Coupled Plasma Source/Capacitively Coupled Plasma Bias Reactor Jun, Hyun-Su; Lee, Dong-Seok; Chang, Hong-Young, JAPANESE JOURNAL OF APPLIED PHYSICS, v.52, no.10, 2013-10 |
Effect of electron collisions on the plasma-sheath formation Kang, SW; Min, KyoungWook; Lee, ES; Seon, J, SURFACE & COATINGS TECHNOLOGY, v.171, pp.173 - 177, 2003-07 |
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