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On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes Lee, Jinwon; Lee, Yun-Seong; Chang, Hong-Young; An, Sang-Hyuk, PHYSICS OF PLASMAS, v.21, no.8, 2014-08 |
Radial density profile change near lower hybrid frequency in M=0 helicon wave plasmas Yun, SM; Chang, Hong-Young, PHYSICS LETTERS A, v.248, no.5-6, pp.400 - 404, 1998-11 |
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