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Electron temperature analysis of two-gas-species inductively coupled plasma Bai, KH; Chang, Hong-Young; Uhm, HS, APPLIED PHYSICS LETTERS, v.79, no.11, pp.1596 - 1598, 2001-09 |
Investigation of self-oscillation using particle balance model Bae, Inshik; Na, Byungkeun; Chang, Hongyoung, PHYSICS OF PLASMAS, v.22, no.8, pp.082101, 2015-08 |
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