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Showing results 1 to 4 of 4

1
Effect of mixing CF4 with O-2 on electron characteristics of capacitively coupled plasma

Seol, Youbin; Chang, Hong Young; Ahn, Seung Kyu; You, Shin Jae, PHYSICS OF PLASMAS, v.30, no.1, 2023-01

2
Experimental observation of the inductive electric field and related plasma nonuniformity in high frequency capacitive discharge

Ahn, Seung Kyu; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.93, no.3, 2008-07

3
Role of low-frequency power in dual-frequency capacitive discharges

Ahn, Seung Kyu; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.95, no.11, 2009-09

4
Study on characteristics of electron parameters on inert gas addition in a capacitively coupled SF6/O-2 plasma

Seol, Youbin; Chang, Hong Young; Ahn, Seung Kyu; You, Shin Jae, AIP ADVANCES, v.12, no.12, 2022-12

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