Showing results 1 to 2 of 2
Characteristics of the Deposition Rate per Unit Power on Pulsed-DC Magnetron Sputtering Source An, Sang-Hyuk; In, Jung-Hwan; Chang, Hong-Young, PLASMA PROCESSES AND POLYMERS, v.6, no.12, pp.855 - 859, 2009-12 |
Experimental investigations of pulse-power-modulated inductive discharges Seo, SH; Chang, Hong-Young; Yang, WC; Kwon, JH; Kim, DH; Kim, YY; Nam, JH; et al, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.48, pp.414 - 421, 2006-03 |
Discover