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Atomic model for the electrical deactivation of N in Si oxynitrides Lee, EC; Chang, Kee-Joo, PHYSICA B-CONDENSED MATTER, v.340, pp.974 - 977, 2003-12 |
Electrically inactive nitrogen complex in Si oxynitride Lee, EC; Chang, Kee-Joo, PHYSICAL REVIEW B, v.66, pp.233205 - 233205, 2002-12 |
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