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Role of low-frequency power in dual-frequency capacitive discharges Ahn, Seung Kyu; Chang, Hong-Young, APPLIED PHYSICS LETTERS, v.95, no.11, 2009-09 |
Study on characteristics of electron parameters on inert gas addition in a capacitively coupled SF6/O-2 plasma Seol, Youbin; Chang, Hong Young; Ahn, Seung Kyu; You, Shin Jae, AIP ADVANCES, v.12, no.12, 2022-12 |
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