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Effect of holes and edges on the squeeze film damping of perforated micromechanical structures Kim, Eung-Sam; Cho, Young-Ho; Kim, Moon-Uhn, 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, pp.296 - 301, IEEE, 1999-01-17 |
Methods for the Squeeze Film Damping Analysis of the Perforated Plates Oscillating Perpendicular to Substrate Han, Ki-Ho; Lee, Won Chul; Kim, KW; Cho, Young-Ho; Kim, Moon-Uhn, 5th Inter. Conf. Micro Opto Electro Mechanical Systems (MOEMS'2001), pp.113 - 114, 2001-09 |
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