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Microgyroscope with vibratory structure having a multitude of grooves Cho, Young-ho; Park, Kyu-yeon; Lee, Chong-won; Song, Ci-moo, 1998-05-19 |
Three-dimensional microstructures fabricated by multi-step electrochemical aluminum-foil etching = 알루미늄 박판의 다단 전해식각을 통한 3차원 마이크로 구조물의 제작link Kim, Yoon-ji; 김윤지; et al, 한국과학기술원, 2009 |
Vibratory microgyroscope Cho, Young-ho; Park, Kyu-yeon; Lee, Chong-won; Song, Ci-moo, 1998-05-05 |
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