학위논문(석사) - 한국과학기술원 : 신소재공학과, 2007.2, [ ix, 91 p. ]
nano mixed film; nano laminated film; high-k dielectric; Atomic Layer Deposition; Al2O3; TiO2; anatase TiO2; 나노혼합박막; 나노적층박막; 원자층 박막 증착법; 유전물질; Al2O3; TiO2
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