증착변수가 $Al_2O_3$ 화학증착에 미치는 영향에 대한 연구The effects of deposition variables on the chemical vapor deposition of $Al_2O_3$
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 남수우 | - |
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Nam, Soo-Woo | - |
| dc.contributor.advisor | Chun, Sung-Soon | - |
| dc.contributor.author | 박철순 | - |
| dc.contributor.author | Park, Chul-Soon | - |
| dc.date.accessioned | 2011-12-15T01:49:09Z | - |
| dc.date.available | 2011-12-15T01:49:09Z | - |
| dc.date.issued | 1982 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=63536&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51775 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1982.2, [ [ii], 54 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Partial pressure. | - |
| dc.subject | Preferred orientation. | - |
| dc.subject | Supersaturation. | - |
| dc.title | 증착변수가 $Al_2O_3$ 화학증착에 미치는 영향에 대한 연구 | - |
| dc.title.alternative | The effects of deposition variables on the chemical vapor deposition of $Al_2O_3$ | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 63536/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000801110 | - |
| dc.contributor.localauthor | 남수우 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.localauthor | Nam, Soo-Woo | - |
| dc.contributor.localauthor | Chun, Sung-Soon | - |
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