스퍼터링으로 증착한 Cr 박막과 Co/Cr 다층박막의 표면응력변화 실시간측정In-situ measurements of the surface stress evolution during sputtering deposition of Cr and Co/Cr thin films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박중근 | - |
| dc.contributor.advisor | Park, Joong-Keun | - |
| dc.contributor.author | 하걸욱 | - |
| dc.contributor.author | Ha, Gul-Wook | - |
| dc.date.accessioned | 2011-12-15T01:46:42Z | - |
| dc.date.available | 2011-12-15T01:46:42Z | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=238339&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51625 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 신소재공학과, 2004.2, [ iv, 102 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 실시간 | - |
| dc.subject | 표면응력 | - |
| dc.subject | 스퍼터링 | - |
| dc.subject | SPUTTERING | - |
| dc.subject | IN-SITU | - |
| dc.subject | SURFACE STRESS | - |
| dc.title | 스퍼터링으로 증착한 Cr 박막과 Co/Cr 다층박막의 표면응력변화 실시간측정 | - |
| dc.title.alternative | In-situ measurements of the surface stress evolution during sputtering deposition of Cr and Co/Cr thin films | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 238339/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 020023645 | - |
| dc.contributor.localauthor | 하걸욱 | - |
| dc.contributor.localauthor | Ha, Gul-Wook | - |
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