스퍼터링으로 증착한 Cr 박막과 Co/Cr 다층박막의 표면응력변화 실시간측정In-situ measurements of the surface stress evolution during sputtering deposition of Cr and Co/Cr thin films
- Advisors
- 박중근researcher; Park, Joong-Keunresearcher
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2004
- Identifier
- 238339/325007 / 020023645
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 신소재공학과, 2004.2, [ iv, 102 p. ]
- Keywords
실시간; 표면응력; 스퍼터링; SPUTTERING; IN-SITU; SURFACE STRESS
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.