스퍼터링으로 증착한 Cr 박막과 Co/Cr 다층박막의 표면응력변화 실시간측정 = In-situ measurements of the surface stress evolution during sputtering deposition of Cr and Co/Cr thin films

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 344
  • Download : 0
Advisors
박중근researcherPark, Joong-Keunresearcher
Description
한국과학기술원 : 신소재공학과,
Publisher
한국과학기술원
Issue Date
2004
Identifier
238339/325007  / 020023645
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 신소재공학과, 2004.2, [ iv, 102 p. ]

Keywords

실시간; 표면응력; 스퍼터링; SPUTTERING; IN-SITU; SURFACE STRESS

URI
http://hdl.handle.net/10203/51625
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=238339&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0