평면 마그네트론 스퍼터링 시스템에서의 타겟 효율 향상을 위한 연구Enhancement of target utilization in a planar magnetron sputtering system
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 서태원 | - |
| dc.contributor.author | Seo, Tae-Won | - |
| dc.date.accessioned | 2011-12-15T01:46:27Z | - |
| dc.date.available | 2011-12-15T01:46:27Z | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=238324&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51610 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 신소재공학과, 2004.2, [ v, 52 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 마그네트론 스퍼터링 | - |
| dc.subject | MAGNETRON SPUTTERING | - |
| dc.title | 평면 마그네트론 스퍼터링 시스템에서의 타겟 효율 향상을 위한 연구 | - |
| dc.title.alternative | Enhancement of target utilization in a planar magnetron sputtering system | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 238324/325007 | - |
| dc.description.department | 한국과학기술원 : 신소재공학과, | - |
| dc.identifier.uid | 020023291 | - |
| dc.contributor.localauthor | 서태원 | - |
| dc.contributor.localauthor | Seo, Tae-Won | - |
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- MS-Theses_Master(석사논문)
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